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Nanofabrication Protocol That Allows Patterning Metallic Electrodes on 2D Materials Reliably (KAUST, National University of Singapore)

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SemiEngineering

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Researchers from KAUST and the National University of Singapore have developed a new nanofabrication protocol for patterning metallic electrodes on 2D materials without the need for adhesive metallic layers. The method involves using a discontinuous coverage of the 2D material during photolithography, combined with electron beam evaporation of metal under moderate vacuum conditions to create a van der Waals interface. This approach resulted in defect-free interfaces with good adhesion, achieving a 100% fabrication yield in their study. The process also demonstrated low leakage currents and minimal device-to-device variability, showing promise for higher performance and reliability in 2D material-based electronic devices and circuits.

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