Virtual Metrology In Semiconductor Manufacturing
Virtual metrology in semiconductor manufacturing may not be perfect due to the constant changes in fab tools and chip designs, but it has its applications. Jon Herlocker, CEO of Tignis (now part of Cohu), discusses why virtual metrology won't entirely replace traditional tools in fabs, where it has shown success, and the data captured by sensors on these tools. This article is part of a series on AI in semiconductor manufacturing.
SemiEngineering•