Optimal Surface Condition For Improved Cu-to-Cu Direct Bonding (NCHU, Osaka Univ.)
Researchers from National Chung Hsing University (NCHU) and Osaka University published a technical paper on enhancing copper-to-copper direct bonding for 3D integrated circuits. The study introduced a hybrid surface pretreatment method using plasmas and pulsed high-energy flash irradiations to modify copper surface conditions, improving bonding performance. The research aims to support fine-pitch vertical interconnects and heterogeneous integration in 3D ICs. The paper provides insights into optimizing surface conditions for improved Cu-to-Cu direct bonding, crucial for advanced semiconductor manufacturing processes.
SemiEngineering•