TSMC reduces peak power consumption of EUV tools by 44% — company to save 190 million kilowatt-hours of electricity by 2030

TSMC has launched the EUV Dynamic Energy Saving Program to reduce the power consumption of its EUV lithography tools, aiming to save 190 million kilowatt-hours of electricity and cut carbon emissions by 101 kilotons by 2030. The program, which involves adaptive power scaling based on real-time operational status, has already reduced peak power consumption by 44%. TSMC plans to implement this program across all its EUV tools globally and in future fab installations. Despite the significant energy savings, it represents only a small portion of TSMC's overall power consumption, with most power being consumed by supporting systems.