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Advancing Autonomous Fabs

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SemiEngineering

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The semiconductor industry is moving towards Autonomous Semiconductor Fabs, driven by increasing process complexity and equipment costs. Preventive maintenance (PM) is now crucial for equipment availability and productivity. PM automation is seen as a key enabler for autonomous semiconductor manufacturing, addressing challenges in large-scale adoption. The industry recognizes the need for PM automation to enhance manufacturing resilience. The white paper emphasizes the importance of system-level transformation in PM automation, requiring coordination across various aspects like equipment design, data infrastructure, and robotics.

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