Advanced Process Control In Semiconductor Manufacturing

Advanced process control in semiconductor manufacturing is crucial for improving yield and reducing scrap as dimensions shrink. Traditional APC has evolved into machine learning-based APC, incorporating virtual metrology. However, data movement can still lead to scrapped wafers. Jon Herlocker from Tignis (now part of Cohu) discusses the future of APC, focusing on intelligent process control and optimizing outcomes. This article is part of a series on AI in semiconductor manufacturing.