A Deionized Water-Based Large-Scale Transfer Process For 2D Materials Grown on Sapphire (AMO, RWTH, Aixtron)

Researchers from AMO GmbH, RWTH Aachen University, and AIXTRON SE have published a technical paper introducing a deionized water-based large-scale transfer method for two-dimensional materials (2DMs) grown on sapphire substrates. The paper highlights the potential of 2DMs for future electronics and the challenges in integrating them with conventional semiconductor processes due to high growth temperatures. The new transfer process aims to address quality issues and safety concerns associated with existing methods using chemicals like potassium hydroxide. The researchers demonstrate the scalability of the process by transferring molybdenum disulfide (MoS2) from a 100mm sapphire wafer, maintaining material quality post-transfer through various characterization techniques.