300mm Fab-Compatible Integration Flow for Planar 2D FETs (imec, KU Leuven)

Researchers from imec and KU Leuven have developed a 300mm fab-compatible integration flow for planar 2D FETs, focusing on WS2 and MoS2 FETs. The process flow addresses challenges in upscaling 2D materials to 300mm-compatible integration modules. It includes fabrication of FETs with monolayer 2D transition metal dichalcogenide channels and covers various integration modules like TMDC growth, transfer, gate stack deposition, and contact optimization. The paper details the process and provides a comprehensive description of the 300mm fab-compatible integration flow, along with electrical evaluation results.